MarSurf UD 120 measures surface and contour in a single pass
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The MarSurf UD 120, from Mahr, can generate both surface and contour measurements in a single pass. Designed for economy, even at high tolerances, this compact system, which is based on the well-proven MarSurf LD 120 system, provides high accuracy measurements over a large measuring range in nanometre resolutions.
The MarSurf UD 120's drive unit enables lengths from 0.1 to 120 mm to be traversed at drive speeds between 0.1 and 2 mm/s, with a glass scale in the X-axis allowing automatic positioning. Probe motion is sensed by an optical measuring system based on a rocker-arm principle that has the stylus tip located on one end and an interferometer on the other. Movement is registered by photo diodes and evaluated electronically. This measuring method enables the UD 120 to achieve a very high resolution over a large range.
The probe measuring range is 10 to 20 mm, and the unit's standard LD A14-102 60° diamond probe yields a Z-axis resolution of 2 nm and a residual Rz0 value of 60 nm. Different probe geometries are also available.
The probe arms are built to a 'bridge-truss' design that ensures maximum rigidity and low oscillation for precision. The 'break-away' magnetic mounting system allows probes to be changed by hand in seconds while providing protection in the event of a system collision. A ball stop assembly assures probe fit to within a micron and, since initial calibration data is saved, subsequent probe changes do not require additional calibration.
The MarSurf UD 120 comes complete with Mahr's XCR 20 CNC software package for automatic measurement operation which, based on Mahr's modular MarWin platform, provides extensive surface and contour measurement and evaluation capability.
